Detail publikace

DOUBLE-BEAM MACH-ZEHNDER INTERFEROMETER FOR THIN PIEZOELECTRIC FILMS MEASUREMENT

SKALSKÝ, M.

Originální název

DOUBLE-BEAM MACH-ZEHNDER INTERFEROMETER FOR THIN PIEZOELECTRIC FILMS MEASUREMENT

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

This paper describes a Mach-Zehnder double-beam interferometer for measurement of piezoelectric films thickness displacement. The measurement of the sample from both sides with probing beam leads to suppression of bending effect, which can otherwise strongly degrade the results acquired by other methods. The performances of the setup were tested on a reference PZT sample. The measured piezoelectric coefficient was in agreement with its theoretical value. The described setup utilizes minimal number of the optical components which are necessary for controlled phase drift compensation. Further techniques for performance enhancement are also proposed.

Klíčová slova

Laser interferometry, Mach-Zehnder interferometer, double-beam, thin piezoelectric films.

Autoři

SKALSKÝ, M.

Vydáno

27. 4. 2017

ISBN

978-80-214-5496-5

Kniha

Proceedings of the 23rd Conference STUDENT EEICT 2017

Strany od

441

Strany do

445

Strany počet

5

BibTex

@inproceedings{BUT135190,
  author="Michal {Skalský}",
  title="DOUBLE-BEAM MACH-ZEHNDER INTERFEROMETER FOR THIN PIEZOELECTRIC FILMS MEASUREMENT",
  booktitle="Proceedings of the 23rd Conference STUDENT EEICT 2017",
  year="2017",
  pages="441--445",
  isbn="978-80-214-5496-5"
}