Detail publikace

Micromorphology of AlN Epilayers on Sapphire Substrates

TALU, S. SOBOLA, D. TOMÁNEK, P. STACH, S.

Originální název

Micromorphology of AlN Epilayers on Sapphire Substrates

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

The purpose of this paper was to describe the 3D nano-scaled surface topography of the aluminum nitride on sapphire. The structures were prepared by magnetron sputtering with heating of the sapphire substrate. The dependence of the layers topography on the substrate temperature was presented. Surface appearance was studied by atomic force microscopy (AFM). The quantitative topography data from AFM were used for surface characterization by fractal analysis and statistical parameters. The results of fractal analysis show the correlation of fractal dimension and statistical characteristics of surface topography. The data may contribute to manufacture of AlN thin films with desired surface characteristics.

Klíčová slova

Aluminum nitride, Atomic force microscopy, Fractal analysis, Minkowsky functionals, Surface micromorphology

Autoři

TALU, S.; SOBOLA, D.; TOMÁNEK, P.; STACH, S.

Vydáno

20. 10. 2017

Nakladatel

DEStech Publications, Inc.

Místo

439 North Duke Street Lancaster, Pennsylvania 17602 U.S.A.

ISBN

978-1-60595-476-9

Kniha

DEStech Transactions on Computer Science and Engineering

Edice

Proceedings CECE 2017

ISSN

2475-8841

Periodikum

DEStech Transactions on Computer Science and Engineering

Stát

Spojené státy americké

Strany od

465

Strany do

470

Strany počet

6

URL

http://dpi-proceedings.com/index.php/dtcse/issue/view/157

BibTex

@inproceedings{BUT140588,
  author="Stefan {Talu} and Dinara {Sobola} and Pavel {Tománek} and Sebastian {Stach}",
  title="Micromorphology of AlN Epilayers on Sapphire Substrates",
  booktitle="DEStech Transactions on Computer Science and Engineering",
  year="2017",
  series="Proceedings CECE 2017",
  journal="DEStech Transactions on Computer Science and Engineering",
  pages="465--470",
  publisher="DEStech Publications, Inc.",
  address="439 North Duke Street 
Lancaster, Pennsylvania 17602 U.S.A.",
  doi="10.12783/dtcse/cece2017/14582",
  isbn="978-1-60595-476-9",
  issn="2475-8841",
  url="http://dpi-proceedings.com/index.php/dtcse/issue/view/157"
}