Control of Dynamics of SPM Probes for Non-destructive defectoscopy

Control of Dynamics of SPM Probes for Non-destructive defectoscopy

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Paper describes a control of dynamics of Scanning Probe Microscopy (SPM) and especially STM microscope probes, which are going to be used for non-destructive defectoscopy on surface and subsurface layers of material with nanometer resolution. STM microscope is based on an electron tunnel effect. The tunnel effect proceeds between a probe and a tested sample, where a probe disturbs so called near-field of the material. A principle of STM microscope allows get an information only from material spot which is just under the probe. Therefore have to be used a manipulator to move with the sample under probe to scan whole surface of the material. The piezonanomanipulator is necessary to this movement, this instrument provide movement under the probe with high accuracy of few nanometers. The nanomanipulator can move itself in 3 axis x,y,z, a movement is realized by the help of piezo-crystals, these are feeding by the voltage from 2 to +12 V. Paper is focused on the quality of used nanomanipulator for a mouvement of the sample. Some characteristics of the capacitance sensors, which form feedback of the mouvement, were also presented.

Paper describes a control of dynamics of Scanning Probe Microscopy (SPM) and especially STM microscope probes, which are going to be used for non-destructive defectoscopy on surface and subsurface layers of material with nanometer resolution. STM microscope is based on an electron tunnel effect. The tunnel effect proceeds between a probe and a tested sample, where a probe disturbs so called near-field of the material. A principle of STM microscope allows get an information only from material spot which is just under the probe. Therefore have to be used a manipulator to move with the sample under probe to scan whole surface of the material. The piezonanomanipulator is necessary to this movement, this instrument provide movement under the probe with high accuracy of few nanometers. The nanomanipulator can move itself in 3 axis x,y,z, a movement is realized by the help of piezo-crystals, these are feeding by the voltage from 2 to +12 V. Paper is focused on the quality of used nanomanipulator for a mouvement of the sample. Some characteristics of the capacitance sensors, which form feedback of the mouvement, were also presented.

nanotechnology, SPM, Dynamics

nanotechnology, SPM, Dynamics

Kala Jaroslav

29.04.2005

VŠB TU Ostrava

Ostrava

80-248-0774-2

Proceedings of XXXth Seminary XXX ASR'05:Instruments and Control '05

30

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