Detail publikace

Correlating structural and mechanical properties of AlN/TiN superlattice films

KOUTNÁ, N. ŘEHÁK, P. CHEN, Z. BARTOSIK, M. FALLMANN, M. ČERNÝ, M. ZHANG, Z. FRIÁK, M. ŠOB, M. MAYRHOFER, P.H. HOLEC, D.

Originální název

Correlating structural and mechanical properties of AlN/TiN superlattice films

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

Combining first-principles and experimental techniques, we establish Young’s modulus dependence of AlN/TiN superlattices on the film-forming phases, their thicknesses and crystallographic orientations. The disparate character of cleavage properties within different layers of the superlattice— providing indications regarding crack initiation processes—is linked to the changes in bond lengths. Such changes present a direct consequence of the predicted interplanar spacing oscillations which are experimentally confirmed by high resolution transmission electron microscopy analyses.

Klíčová slova

transition metal nitrides; superlattices; microstructural design; elastic moduli; cleavage energy

Autoři

KOUTNÁ, N.; ŘEHÁK, P.; CHEN, Z.; BARTOSIK, M.; FALLMANN, M.; ČERNÝ, M.; ZHANG, Z.; FRIÁK, M.; ŠOB, M.; MAYRHOFER, P.H.; HOLEC, D.

Vydáno

1. 5. 2019

ISSN

1359-6462

Periodikum

SCRIPTA MATERIALIA

Ročník

165

Číslo

3

Stát

Spojené státy americké

Strany od

159

Strany do

163

Strany počet

5

BibTex

@article{BUT155625,
  author="KOUTNÁ, N. and ŘEHÁK, P. and CHEN, Z. and BARTOSIK, M. and FALLMANN, M. and ČERNÝ, M. and ZHANG, Z. and FRIÁK, M. and ŠOB, M. and MAYRHOFER, P.H. and HOLEC, D.",
  title="Correlating structural and mechanical properties of AlN/TiN superlattice films",
  journal="SCRIPTA MATERIALIA",
  year="2019",
  volume="165",
  number="3",
  pages="159--163",
  doi="10.1016/j.scriptamat.2019.02.021",
  issn="1359-6462"
}