Detail publikačního výsledku

Computations of the Low Voltage BSE Detector in SEM

Petr Wandrol

Originální název

Computations of the Low Voltage BSE Detector in SEM

Anglický název

Computations of the Low Voltage BSE Detector in SEM

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

This paper deals with the possibilities of backscattered electrons detection by scintillation detector in low voltage scanning electron microscope (LV SEM). Low energy of signal electrons, especially backscattered electrons, is the reason of lower detectors yield. While the problem of secondary electrons detection was successfully solved by their extraction using a magnetic field and detection in objective lens, efficient detection of backscattered electrons remains unsolved. The initial energy of backscattered electrons of 0.7-3 kV is the energy, on which the light yield of scintillators decreases. Backscattered electrons with this energy will be accelerated to scintillator by electrostatic field and secondary electrons with maximal energy of 50 eV will be filtered by an energy filter or by a magnetic field.

Anglický abstrakt

This paper deals with the possibilities of backscattered electrons detection by scintillation detector in low voltage scanning electron microscope (LV SEM). Low energy of signal electrons, especially backscattered electrons, is the reason of lower detectors yield. While the problem of secondary electrons detection was successfully solved by their extraction using a magnetic field and detection in objective lens, efficient detection of backscattered electrons remains unsolved. The initial energy of backscattered electrons of 0.7-3 kV is the energy, on which the light yield of scintillators decreases. Backscattered electrons with this energy will be accelerated to scintillator by electrostatic field and secondary electrons with maximal energy of 50 eV will be filtered by an energy filter or by a magnetic field.

Klíčová slova

low voltage scanning electron microscopy, LV SEM, backscattered electrons, detection

Klíčová slova v angličtině

low voltage scanning electron microscopy, LV SEM, backscattered electrons, detection

Autoři

Petr Wandrol

Vydáno

01.01.2005

Nakladatel

Vysoké učení technické v Brně

Místo

Brno

ISBN

80-214-2889-9

Kniha

proceedings of the 11th Conference Student EEICT 2005

Strany od

337

Strany počet

4

BibTex

@inproceedings{BUT16672,
  author="Petr {Wandrol}",
  title="Computations of the Low Voltage BSE Detector in SEM",
  booktitle="proceedings of the 11th Conference Student EEICT 2005",
  year="2005",
  number="1",
  pages="4",
  publisher="Vysoké učení technické v Brně",
  address="Brno",
  isbn="80-214-2889-9"
}