Detail publikace

Beam shaping and probe characterization in the scanning electron microscope

ŘIHÁČEK, T. HORÁK, M. SCHACHINGER, T. MIKA, F. MATĚJKA, M. KRÁTKÝ, S. FOŘT, T. RADLIČKA, T. JOHNSON, C. NOVÁK, L. SEĎA, B. MCMORRAN, B. MÜLLEROVÁ, I.

Originální název

Beam shaping and probe characterization in the scanning electron microscope

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

Here we demonstrate the use of nanofabricated grating holograms to diffract and shape electrons in a scanning electron microscope. The diffraction grating is placed in an aperture in the column. The entire diffraction pattern can be passed through the objective lens and projected onto the specimen, or an intermediate aperture can be used to select particular diffracted beams. We discuss several techniques for characterizing the diffraction pattern. The grating designs can incorporate features that can influence the phase and intensity of the diffracted SEM probe. We demonstrate this by producing electron vortex beams.

Klíčová slova

Electron diffraction;SEM;Electron beam structuring;Spot shape measurement;Electron vortex beam

Autoři

ŘIHÁČEK, T.; HORÁK, M.; SCHACHINGER, T.; MIKA, F.; MATĚJKA, M.; KRÁTKÝ, S.; FOŘT, T.; RADLIČKA, T.; JOHNSON, C.; NOVÁK, L.; SEĎA, B.; MCMORRAN, B.; MÜLLEROVÁ, I.

Vydáno

21. 4. 2021

Nakladatel

Elsevier

ISSN

0304-3991

Periodikum

Ultramicroscopy

Ročník

225

Číslo

1

Stát

Nizozemsko

Strany od

1

Strany do

9

Strany počet

9

URL

https://doi.org/10.1016/j.ultramic.2021.113268

BibTex

@article{BUT171291,
  author="Tomáš {Řiháček} and Michal {Horák} and Thomas {Schachinger} and Filip {Mika} and Milan {Matějka} and S. {Krátký} and Tomáš {Fořt} and Tomáš {Radlička} and C.W. {Johnson} and Libor {Novák} and Bohuslav {Seďa} and B.J. {McMorran} and Ilona {Müllerová}",
  title="Beam shaping and probe characterization in the scanning electron microscope",
  journal="Ultramicroscopy",
  year="2021",
  volume="225",
  number="1",
  pages="1--9",
  doi="10.1016/j.ultramic.2021.113268",
  issn="0304-3991",
  url="https://doi.org/10.1016/j.ultramic.2021.113268"
}