Detail publikace

Preparation and Characterisation of Thin Films of Antimony Tin Oxide

Bartoš, R Dzik, P

Originální název

Preparation and Characterisation of Thin Films of Antimony Tin Oxide

Typ

abstrakt

Jazyk

angličtina

Originální abstrakt

Liquid composition for antimony doped tin oxide sol-gel deposition was pre- pared. Inorganic precursors of tin and antimony and ATO nanoparticles were used (tin(IV) chloride, antimony(III) chloride). ATO nanoparticles were dispersed in composition. This composition was used for spin-coating deposition of thin films. Composition was shaken for 0 – 8 days on laboratory shaker with 1 mm glass marbles. Set of samples made of 1 – 4 layers was deposited from every shaking period composition. Sheet resistance of prepared samples were examined by four probe sensing. Lowest sheet resistance of 2,83 kΩ/sq was reached. RMS roughness and thickness was measured by contact profilometry and calculated. Roughness range was calculated to 1,0 – 1,4 μm for nonshaken composition set of samples and 0,2 – 0,4 μm for shaken composition sets o samples. Thickness of samples reached 1,1 – 3,6 μm depends on number of layers deposited. Samples were measured on X-ray diffraction (XRD). Transmittance and haze were measured and calculated by UV-VIS spectrometry with integration sphere. Transmittance was ranged between 65 – 82 % depends on wavelength with maximum at 550 nm. Haze of samples was in range of 1 – 6 % depends on wavelength of light measured with minimum at red area and maximum at blue area of Visible spectrum.

Klíčová slova

antimony tin oxide, thin layers, spin-coating

Autoři

Bartoš, R; Dzik, P

Vydáno

21. 11. 2019

Nakladatel

Vysoké Učení Technické v Brně, Fakulta Chemická

Místo

Brno

ISBN

978-80-214-5807-9

Kniha

Studentská odborná konference Chemie je život 2019 - Sborník abstraktů

Číslo edice

1

Strany od

70

Strany do

70

Strany počet

1

URL

https://www.fch.vut.cz/vav/konference/sok/vystupy/sbornik-abstraktu-2019-v2-pdf-p188439

BibTex

@misc{BUT172751,
  author="Radim {Bartoš} and Petr {Dzik}",
  title="Preparation and Characterisation of Thin Films of Antimony Tin Oxide",
  booktitle="Studentská odborná konference Chemie je život 2019 - Sborník abstraktů",
  year="2019",
  edition="1",
  pages="70--70",
  publisher="Vysoké Učení Technické v Brně, Fakulta Chemická",
  address="Brno",
  isbn="978-80-214-5807-9",
  url="https://www.fch.vut.cz/vav/konference/sok/vystupy/sbornik-abstraktu-2019-v2-pdf-p188439",
  note="abstract"
}