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SUTORÝ, T. KOLKA, Z.
Originální název
Characterization of Nonlinear On-Chip Capacitors
Typ
článek ve sborníku ve WoS nebo Scopus
Jazyk
angličtina
Originální abstrakt
The paper deals with nonlinear on-chip capacitor characterization. A modification of CBCM (Charge-Based Capacitance Measurements) has been proposed. The CBCM method was originally developed for linear interconnect-capacitance measurements. The proposed modification uses two DC swept sources to measure the whole nonlinear Q-v characteristic in both polarities without the necessity to switch the measured object. The main advantage of the method is high resolution although it is based on equipment found in any average laboratory. A test-chip implementing the method was designed and manufactured in 0.35m CMOS process. Verification against known capacitances proved the method correctness and accuracy. The test-chip was successfully used for MOSFET gate-capacitance characterization.
Klíčová slova
Microelectronics, CBCM, testing
Autoři
SUTORÝ, T.; KOLKA, Z.
Rok RIV
2007
Vydáno
1. 4. 2007
Nakladatel
Brno University of Technology
Místo
Brno
ISBN
1-4244-0821-0
Kniha
Proceedings of the 17th International Conference Radioelektronka 2007
Strany od
51
Strany do
55
Strany počet
5
BibTex
@inproceedings{BUT23787, author="Tomáš {Sutorý} and Zdeněk {Kolka}", title="Characterization of Nonlinear On-Chip Capacitors", booktitle="Proceedings of the 17th International Conference Radioelektronka 2007", year="2007", pages="5", publisher="Brno University of Technology", address="Brno", isbn="1-4244-0821-0" }