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SUTORÝ, T. KOLKA, Z.
Originální název
Characterization of Nonlinear Integrated Capacitors
Typ
článek v časopise - ostatní, Jost
Jazyk
angličtina
Originální abstrakt
The paper deals with a modified CBCM (Charge-Based Capacitance Measurements) method for nonlinear capacitance characterization. The method is characterized by high resolution although it is based on equipment found in any average laboratory. CBCM was originally developed for linear interconnect measurements. The proposed modification uses two DC swept sources to measure the whole nonlinear Q-v characteristic in both polarities without the necessity to switch the measured object. A test-chip implementing the method was designed and manufactured in the 0.35 um CMOS process. Verification against known capacitances proved the correctness and accuracy of the method. It was successfully used for MOSCAPs characterization.
Klíčová slova
Charge-based capacitance measurements, test structures, MOS capacitors, integrated circuits.
Autoři
SUTORÝ, T.; KOLKA, Z.
Rok RIV
2008
Vydáno
1. 12. 2008
ISSN
1210-2512
Periodikum
Radioengineering
Ročník
17
Číslo
4
Stát
Česká republika
Strany od
9
Strany do
14
Strany počet
6
BibTex
@article{BUT48041, author="Tomáš {Sutorý} and Zdeněk {Kolka}", title="Characterization of Nonlinear Integrated Capacitors", journal="Radioengineering", year="2008", volume="17", number="4", pages="9--14", issn="1210-2512" }