Detail publikace

Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films

OHLÍDAL, M. OHLÍDAL, I. KLAPETEK, P. NEČAS, D. BURŠÍKOVÁ, V.

Originální název

Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

Complete optical characterization of diamond-like carbon films non-uniform in thickness is performed usig spectroscopic imaging reflectometry. It is shown that by using this technique it is possible to determine the distributions of the refractive index, extinction coefficient and thickness (with arbitrary shape of the thickness non-uniformity) of these films.

Klíčová slova

spectroscopic imaging reflectometry, diamond-like carbon films, optical analysis

Autoři

OHLÍDAL, M.; OHLÍDAL, I.; KLAPETEK, P.; NEČAS, D.; BURŠÍKOVÁ, V.

Rok RIV

2009

Vydáno

31. 1. 2009

Nakladatel

Elsevier

Místo

LAUSANNE

ISSN

0925-9635

Periodikum

Diamond and Related Materials

Ročník

2009 (18)

Číslo

1

Stát

Nizozemsko

Strany od

384

Strany do

387

Strany počet

4

BibTex

@article{BUT48065,
  author="Miloslav {Ohlídal} and Ivan {Ohlídal} and Petr {Klapetek} and David {Nečas} and Vilma {Buršíková}",
  title="Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films",
  journal="Diamond and Related Materials",
  year="2009",
  volume="2009 (18)",
  number="1",
  pages="384--387",
  issn="0925-9635"
}