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Detail publikace
KONTÁROVÁ, S. ČECH, V.
Originální název
Plasma polymer multilayers of organosilicones and their optical properties controlled by RF power
Typ
abstrakt
Jazyk
angličtina
Originální abstrakt
Well-defined multilayered films were deposited from tetravinylsilane combining individual layers polymerized at different powers. A realistic model of the multilayer structure was used to analyze ellipsometric data and distinguish individual layers in the multilayered film, evaluate their thickness and optical constants. Dispersion dependences for the refractive index were well separated for each type of individual layer, if the thickness was decreased 500 - 25 nm, and corresponded to those of the single layer.
Klíčová slova
Multilayer, plasma polymerization, ellipsometry, refractive index, extinction coefficient
Autoři
KONTÁROVÁ, S.; ČECH, V.
Vydáno
27. 12. 2010
Strany od
1
Strany do
Strany počet
BibTex
@misc{BUT60978, author="Soňa {Kontárová} and Vladimír {Čech}", title="Plasma polymer multilayers of organosilicones and their optical properties controlled by RF power", booktitle="PSE 2010", year="2010", edition="1", pages="1--1", note="abstract" }