Detail publikace

Mechanical properties of Al thin film measured by two different methods

KUBĚNA, I. KRUML, T.

Originální název

Mechanical properties of Al thin film measured by two different methods

Typ

článek v časopise - ostatní, Jost

Jazyk

angličtina

Originální abstrakt

Mechanical properties of an aluminium thin film were measured by microcompression and indentation tests. The microcompression technique combines preparation of specimens using focused ion beam (FIB) and compression test by a nanoindeter device. Cylindrical specimens were prepared by focused ion beam milling. The height of cylindrical specimens was about 2 mm and their diameter about 1,3 mm. The load and displacement were continuously measured during tests. The stress-strain curves were obtained in two representations. Stresses of the first plastic bursts were determined in both representations. Hardness and Young modulus were measured by indentation test using continuous stiffness method. Representative values of thin film were calculated.

Klíčová slova

thin films, focused ion beam, aluminium, nanoindentation

Autoři

KUBĚNA, I.; KRUML, T.

Rok RIV

2011

Vydáno

1. 11. 2011

ISSN

1335-1532

Periodikum

Acta Metallurgica Slovaca

Ročník

17

Číslo

3

Stát

Slovenská republika

Strany od

163

Strany do

168

Strany počet

6

BibTex

@article{BUT75370,
  author="Ivo {Kuběna} and Tomáš {Kruml}",
  title="Mechanical properties of Al thin film measured by two different methods",
  journal="Acta Metallurgica Slovaca",
  year="2011",
  volume="17",
  number="3",
  pages="163--168",
  issn="1335-1532"
}