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Detail publikace
SOLČANSKÝ, M. VANĚK, J. PORUBA, A.
Originální název
Quinhydrone Chemical Passivation of a Silicon Surface for Minority Carrier Bulk-Lifetime Measurements
Typ
článek v časopise ve Web of Science, Jimp
Jazyk
angličtina
Originální abstrakt
For the measurement of the minority carrier bulk-lifetime the characterization method MW-PCD is used, where the result of measurement is the effective carrier lifetime, which is very dependent on the surface recombination velocity and therefore on the quality of a silicon surface passivation. This work deals with an examination of a different solution types for the chemical passivation of a silicon surface. Various solutions are tested on silicon wafers for their consequent comparison. The main purpose is to find optimal solution, which suits the requirements of a time stability and start-up velocity of passivation, reproducibility of the measurements and a possibility of a perfect cleaning of a passivating solution remains from a silicon surface, so that the parameters of a measured silicon wafer will not worsen and there will not be any contamination of the other wafers series in the production after a repetitive return of the measured wafer into the production process. The cleaning process itself is also a subject of a development.
Klíčová slova
quinhydrone, chemical passivation
Autoři
SOLČANSKÝ, M.; VANĚK, J.; PORUBA, A.
Rok RIV
2012
Vydáno
27. 4. 2012
Nakladatel
HINDAWI PUBLISHING CORPORATION
Místo
NEW YORK
ISSN
1110-662X
Periodikum
INTERNATIONAL JOURNAL OF PHOTOENERGY
Ročník
Číslo
Stát
Egyptská arabská republika
Strany od
1
Strany do
4
Strany počet
URL
http://www.hindawi.com/journals/ijp/2012/732647/
BibTex
@article{BUT91628, author="Marek {Solčanský} and Jiří {Vaněk} and Aleš {Poruba}", title="Quinhydrone Chemical Passivation of a Silicon Surface for Minority Carrier Bulk-Lifetime Measurements", journal="INTERNATIONAL JOURNAL OF PHOTOENERGY", year="2012", volume="2012", number="2012", pages="1--4", issn="1110-662X", url="http://www.hindawi.com/journals/ijp/2012/732647/" }