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VYROUBAL, P. MAXA, J.
Originální název
Analysis of the Impact of Supersonic Flow in Detector of Secondary Electrons ESEM
Typ
článek ve sborníku ve WoS nebo Scopus
Jazyk
angličtina
Originální abstrakt
Environmental scanning electron microscopy (ESEM) is one of the latest trends in microscopic methods. This type of microscope can works in two modes. In the vacuum mode, it acts as conventional scanning electron microscope (SEM). In the environmental mode, the microscope works at higher pressures in the specimen chamber, which has its advantages. We can observe samples electrically non-conductive and even wet samples without the risk of damage by drying. Scintillation and ionization detectors are used to detect secondary electrons. The ionization detector works on the principle of impact ionization. The scintillation detector contains a scintillator (e.g. YAG, CRY 18, etc.), which releases electrons when they hit a flash of light whose intensity is proportional to the energy of incident electrons. This article deals with analysis of the scintillation detector using CAD, CAE and ANSYS systems and applications with Laval nozzle aperture.
Klíčová slova
Aperture, circular hole, Environmental scanning electron microscope, Laval nozzle, scintillation detector, trajectory of secondary electrons.
Autoři
VYROUBAL, P.; MAXA, J.
Rok RIV
2012
Vydáno
30. 5. 2012
Nakladatel
Silhavy sro.
Místo
Vsetín
ISBN
978-80-904741-1-6
Kniha
2nd Computer Science On-Line Conference in 2012
Edice
1
Číslo edice
Strany od
149
Strany do
155
Strany počet
7
BibTex
@inproceedings{BUT92269, author="Petr {Vyroubal} and Jiří {Maxa}", title="Analysis of the Impact of Supersonic Flow in Detector of Secondary Electrons ESEM", booktitle="2nd Computer Science On-Line Conference in 2012", year="2012", series="1", number="1", pages="149--155", publisher="Silhavy sro.", address="Vsetín", isbn="978-80-904741-1-6" }