Detail publikace

Impact of the shape of the differentially pumped chamber on critical flow character

HLAVATÁ, P. MAXA, J. BÍLEK, M. VYROUBAL, P.

Originální název

Impact of the shape of the differentially pumped chamber on critical flow character

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

The article deals with the impact of the shape of the differential pumped chamber of the Environmental electron microscope on resultant value of average Normalized density number on the path of the primary electron beam which has directly proportional influence on the dispersion of this beam and thereby influence on sharpness resulting image. Analysis were made using finite volume method in Ansys Fluent system with the respect to critical flow created behind the aperture which separates differential pumped chamber from specimen chamber.

Klíčová slova

Dr. Danilatos, Monte Carlo, ANSYS Fluent, differentially pumped chamber, environmental scanning electron microscope

Autoři

HLAVATÁ, P.; MAXA, J.; BÍLEK, M.; VYROUBAL, P.

Vydáno

30. 11. 2017

Nakladatel

Electrochemical Society Inc.

ISBN

9781607688297

Kniha

ECS Transactions

Edice

81

Číslo edice

1

ISSN

1938-5862

Periodikum

ECS Transactions

Ročník

81

Číslo

1

Stát

Spojené státy americké

Strany od

317

Strany do

322

Strany počet

6

URL

https://iopscience.iop.org/article/10.1149/08101.0317ecst/pdf

BibTex

@inproceedings{BUT140360,
  author="Pavla {Šabacká} and Jiří {Maxa} and Michal {Bílek} and Petr {Vyroubal}",
  title="Impact of the shape of the differentially pumped chamber on critical flow
character",
  booktitle="ECS Transactions",
  year="2017",
  series="81",
  journal="ECS Transactions",
  volume="81",
  number="1",
  pages="317--322",
  publisher="Electrochemical Society Inc.",
  doi="10.1149/08101.0317ecst",
  isbn="9781607688297",
  issn="1938-5862",
  url="https://iopscience.iop.org/article/10.1149/08101.0317ecst/pdf"
}