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LINHART, J. NEDĚLA, V.
Originální název
Difference between SE and BSE contrast in ESEM
Typ
článek ve sborníku ve WoS nebo Scopus
Jazyk
angličtina
Originální abstrakt
This paper deals with the study of secondary electrons (SE) and backscattered electrons (BSE) contrast in the environmental scanning electron microscopy (ESEM). The main difference of SE and BSE detection in ESEM is influenced by the used detector system. The gaseous SE detector and the scintillation BSE detector can be used. For the reason to understand differences between SE and BSE imaging, the theoretical background of generation, detection and characters of SE and BSE and mechanism of interactions between electrons and environmental conditions are described. This theory is verified by direct comparative pictures of nonconductive samples at variable pressure.
Klíčová slova v angličtině
secondary electrons, backscattered electrons, environmental scanning electron microscopy, observating of nonconductive samples
Autoři
LINHART, J.; NEDĚLA, V.
Vydáno
9. 2. 2005
Nakladatel
Faculty of electrical engineering and information technology, Slovak University of technology
Místo
Bratislava
ISBN
80-7043-474-0
Kniha
Proceedings of the seventh conference for PhD students ELITECH 2005
Strany od
103
Strany do
105
Strany počet
3
URL
ÚPT AVČR Brno
BibTex
@inproceedings{BUT14417, author="Jan {Linhart} and Vilém {Neděla}", title="Difference between SE and BSE contrast in ESEM", booktitle="Proceedings of the seventh conference for PhD students ELITECH 2005", year="2005", pages="3", publisher="Faculty of electrical engineering and information technology, Slovak University of technology", address="Bratislava", isbn="80-7043-474-0", url="ÚPT AVČR Brno" }