Detail publikace

Using the ideal and real gas model for the mathematical - physics analysis of the experimental chambre

MAXA, J. HLAVATÁ, P. VYROUBAL, P.

Originální název

Using the ideal and real gas model for the mathematical - physics analysis of the experimental chambre

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

This article comes out from the series of articles devoted to the issue of pumping in the differentially pumped chamber. This article is based on a study of Dr. Danilatos, where pumping of the differential pumped chamber is solved using the Monte Carlo statistic method. To solve the problem, we use the mechanics of continuum with experimental verification. The article deals with a construction of the conic tip of the static probe.

Klíčová slova

Environmental scanning electron microscope (ESEM), ANSYS Fluent, finite volume method, Differentially pumped chamber, Taylor – Maccoll theory.

Autoři

MAXA, J.; HLAVATÁ, P.; VYROUBAL, P.

Vydáno

20. 10. 2018

ISBN

978-80-214-5109-4

Kniha

ECS Transactions

ISSN

1938-5862

Periodikum

ECS Transactions

Číslo

1

Stát

Spojené státy americké

Strany od

377

Strany do

387

Strany počet

11

URL

BibTex

@inproceedings{BUT150573,
  author="Jiří {Maxa} and Pavla {Šabacká} and Petr {Vyroubal}",
  title="Using the ideal and real gas model for the mathematical - physics analysis of the experimental chambre",
  booktitle="ECS Transactions",
  year="2018",
  journal="ECS Transactions",
  number="1",
  pages="377--387",
  doi="10.1149/08701.0377ecst",
  isbn="978-80-214-5109-4",
  issn="1938-5862",
  url="https://iopscience.iop.org/article/10.1149/08701.0377ecst"
}