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MAXA, J. HLAVATÁ, P. VYROUBAL, P.
Originální název
Using the ideal and real gas model for the mathematical - physics analysis of the experimental chambre
Typ
článek ve sborníku ve WoS nebo Scopus
Jazyk
angličtina
Originální abstrakt
This article comes out from the series of articles devoted to the issue of pumping in the differentially pumped chamber. This article is based on a study of Dr. Danilatos, where pumping of the differential pumped chamber is solved using the Monte Carlo statistic method. To solve the problem, we use the mechanics of continuum with experimental verification. The article deals with a construction of the conic tip of the static probe.
Klíčová slova
Environmental scanning electron microscope (ESEM), ANSYS Fluent, finite volume method, Differentially pumped chamber, Taylor – Maccoll theory.
Autoři
MAXA, J.; HLAVATÁ, P.; VYROUBAL, P.
Vydáno
20. 10. 2018
ISBN
978-80-214-5109-4
Kniha
ECS Transactions
ISSN
1938-5862
Periodikum
Číslo
1
Stát
Spojené státy americké
Strany od
377
Strany do
387
Strany počet
11
URL
https://iopscience.iop.org/article/10.1149/08701.0377ecst
BibTex
@inproceedings{BUT150573, author="Jiří {Maxa} and Pavla {Šabacká} and Petr {Vyroubal}", title="Using the ideal and real gas model for the mathematical - physics analysis of the experimental chambre", booktitle="ECS Transactions", year="2018", journal="ECS Transactions", number="1", pages="377--387", doi="10.1149/08701.0377ecst", isbn="978-80-214-5109-4", issn="1938-5862", url="https://iopscience.iop.org/article/10.1149/08701.0377ecst" }