Detail publikace

MEMS Microhotplates for Chemical Sensors

PRÁŠEK, J. VANČÍK, S. SVATOŠ, V. KLEMPA, J. GABLECH, I. PYTLÍČEK, Z. LEVEK, V.

Originální název

MEMS Microhotplates for Chemical Sensors

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

In this paper, we design and develop low-power MEMS based microhotplates for chemiresistive gas sensors using computer modelling and microelectronic technologies, respectively. Two geometrical designs of supporting beams of suspended membranes were designed and simulated to evaluate displacement in the structure. Two different patterns of heating elements were designed, and the power consumption was calculated. Fabricated structures are studied and compared with the theoretical data obtained from simulations.

Klíčová slova

microhotplate; MEMS; micromachining; gas sensor

Autoři

PRÁŠEK, J.; VANČÍK, S.; SVATOŠ, V.; KLEMPA, J.; GABLECH, I.; PYTLÍČEK, Z.; LEVEK, V.

Vydáno

21. 8. 2018

Nakladatel

IEEE Computer Society

Místo

Serbia

ISBN

9781538657317

Kniha

41st International Spring Seminar on Electronics Technology ISSE2018

ISSN

2161-2528

Periodikum

Electronics Technology (ISSE)

Ročník

2018

Stát

Spojené státy americké

Strany od

1

Strany do

5

Strany počet

5

BibTex

@inproceedings{BUT150735,
  author="Jan {Prášek} and Silvester {Vančík} and Vojtěch {Svatoš} and Jaroslav {Klempa} and Imrich {Gablech} and Zdeněk {Pytlíček} and Vladimír {Levek}",
  title="MEMS Microhotplates for Chemical Sensors",
  booktitle="41st International Spring Seminar on Electronics Technology ISSE2018",
  year="2018",
  journal="Electronics Technology (ISSE)",
  volume="2018",
  pages="1--5",
  publisher="IEEE Computer Society",
  address="Serbia",
  doi="10.1109/ISSE.2018.8443768",
  isbn="9781538657317",
  issn="2161-2528"
}