Detail publikace

Integration of one-dimensional gas sensitive nanostructures grown via chemical vapour deposition into microdevices

VALLEJOS VARGAS, S. TOMIC, M. FIGUERAS, E. CHMELA, O. HUBÁLEK, J. DOMENECH, G. PRADES, D. ROMANO-RODRIGUEZ, A. BARTH, S. CANÉ, C.

Originální název

Integration of one-dimensional gas sensitive nanostructures grown via chemical vapour deposition into microdevices

Typ

konferenční sborník (ne článek)

Jazyk

angličtina

Originální abstrakt

Nanostructures (NS), e.g., based on metal oxides, are attractive in gas sensors because they proved to enhance their functionality, providing better sensitivity, stability, and selectivity. Further enhancement of the functionality of nanostructures is also known to be achieved by electronic and/or chemical sensitization via the surface modification with second-phase materials (e.g., catalytic nanoparticles with sizes less than 10 nm). The formation of NSs is traditionally achieved via liquid- or vapour-phase routes, with the vapour-phase routes (e.g., CVD) having shown advantages that include greater purity, the ability to generate NSs in continuous rather than batch mode and higher throughputs. This is crucial for developing a low cost manufacturing method of gas sensing devices that may be adequate for high volume Smart System Solutions. Thus, in this work, the use of CVD and aerosol assisted (AA) CVD to synthesize non-modified and modified NSs is proposed.

Klíčová slova

Chemical detection, Chemical modification, Gas detectors, Gas sensing electrodes, Grid computing, Integration, Nanostructures, Surface treatment

Autoři

VALLEJOS VARGAS, S.; TOMIC, M.; FIGUERAS, E.; CHMELA, O.; HUBÁLEK, J.; DOMENECH, G.; PRADES, D.; ROMANO-RODRIGUEZ, A.; BARTH, S.; CANÉ, C.

Vydáno

11. 4. 2018

Nakladatel

Mesago Messe Frankfurt GmbH

Místo

Stuttgart, Germany

ISBN

978-3-95735-082-4

Kniha

Proceedings Smart Systems Integration 2018 International Conference & Exhibition on integration issues of miniaturized systems - MEMS, NEMS, ICs and electronic components

Strany od

250

Strany do

257

Strany počet

8

BibTex

@proceedings{BUT151382,
  editor="VALLEJOS VARGAS, S. and TOMIC, M. and FIGUERAS, E. and CHMELA, O. and HUBÁLEK, J. and DOMENECH, G. and PRADES, D. and ROMANO-RODRIGUEZ, A. and BARTH, S. and CANÉ, C.",
  title="Integration of one-dimensional gas sensitive nanostructures grown via chemical vapour deposition into microdevices",
  year="2018",
  pages="250--257",
  publisher="Mesago Messe Frankfurt GmbH",
  address="Stuttgart, Germany",
  isbn="978-3-95735-082-4"
}