Detail publikace

MEASUREMENT UNCERTAINTY SIMULATION BY MONTE CARLO METHOD IN NANOMETROLOGY

ŠRÁMEK, J. JANKOVÝCH, R.

Originální název

MEASUREMENT UNCERTAINTY SIMULATION BY MONTE CARLO METHOD IN NANOMETROLOGY

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

This paper deals with the determination of uncertainty and individual contributions to the measurement uncertainty on the CMM SIOS NNM-1 instrument fitted with the touch-probe scanning system Gannen XP. Manufacturer SIOS designates this machine as nano-CMM. Two non-simulation methods to determine the measurement uncertainty, the substitution and multi-position methods are addressed in detail [Sramek, Jankovych 2018]. Ruby balls with various nominal diameters are used as the measured objects. One simulation method to determine the measurement uncertainty, the Monte Carlo method, is also addressed in this paper. The paper also summarizes and specifies calculation methods to determine the measurement uncertainty, and provides results of representative sets of measurements, including determination of the expanded measurement uncertainty. This paper contains novel conclusions in the area of uncertainty measurement of nano-CMMs.

Klíčová slova

accuracy of measurement, length measurement, measurement repeatability, measurement reproducibility, measurement uncertainty, measuring device, nanometrology, ruby ball

Autoři

ŠRÁMEK, J.; JANKOVÝCH, R.

Vydáno

1. 10. 2019

Nakladatel

Modern Machinery (MM) Science Journal

Místo

ČR

ISSN

1805-0476

Periodikum

MM Science Journal

Ročník

Oct 2019

Číslo

3

Stát

Česká republika

Strany od

2998

Strany do

3004

Strany počet

6

URL

https://www.mmscience.eu/journal/issues/October%202019/articles/measurement-uncertainty-simulation-by-monte-carlo-method-in-nanometrology

BibTex

@article{BUT162066,
  author="Jan {Šrámek} and Róbert {Jankových}",
  title="MEASUREMENT UNCERTAINTY SIMULATION BY MONTE CARLO METHOD IN NANOMETROLOGY",
  journal="MM Science Journal",
  year="2019",
  volume="Oct 2019",
  number="3",
  pages="2998--3004",
  doi="10.17973/MMSJ.2019\{_}10\{_}2018112",
  issn="1805-0476",
  url="https://www.mmscience.eu/journal/issues/October%202019/articles/measurement-uncertainty-simulation-by-monte-carlo-method-in-nanometrology"
}