Detail publikace

Mathematical Physics Analysis of Nozzle Shaping at the Gas Outlet from the Aperture to the Differentially Pumped Chamber in Environmental Scanning Electron Microscopy (ESEM)

MAXA, J. NEDĚLA, V. ŠABACKÁ, P. BINAR, T.

Originální název

Mathematical Physics Analysis of Nozzle Shaping at the Gas Outlet from the Aperture to the Differentially Pumped Chamber in Environmental Scanning Electron Microscopy (ESEM)

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

A combination of experimental measurement preparations using pressure and temperature sensors in conjunction with the theory of one-dimensional isentropic flow and mathematical physics analyses is presented as a tool for analysis in this paper. Furthermore, the subsequent development of a nozzle for use in environmental electron microscopy between the specimen chamber and the differentially pumped chamber is described. Based on experimental measurements, an analysis of the impact of the nozzle shaping located behind the aperture on the character of the supersonic flow and the resulting dispersion of the electron beam passing through the differential pumped chamber is carried out on the determined pressure ratio using a combination of theory and mathematical physics analyses. The results show that nozzle shapes causing under-expanded gas outflow from the aperture to the nozzle have a worse impact on the dispersion of the primary electron beam. This is due to the flow velocity control. The controlled reduction in the static pressure curve on the primary electron beam path thus causes a significantly higher course of electron dispersion values than variants with shapes causing over-expanded gas outflow.

Klíčová slova

Ansys Fluent; ESEM; critical flow; nozzle; CFD; numerical simulation

Autoři

MAXA, J.; NEDĚLA, V.; ŠABACKÁ, P.; BINAR, T.

Vydáno

20. 5. 2024

Nakladatel

MDPI

Místo

BASEL

ISSN

1424-8220

Periodikum

SENSORS

Ročník

24

Číslo

10

Stát

Švýcarská konfederace

Strany od

1

Strany do

26

Strany počet

26

URL

https://www.mdpi.com/1424-8220/24/10/3243

BibTex

@article{BUT188712,
  author="Jiří {Maxa} and Vilém {Neděla} and Pavla {Šabacká} and Tomáš {Binar}",
  title="Mathematical Physics Analysis of Nozzle Shaping at the Gas Outlet from the Aperture to the Differentially Pumped Chamber in Environmental Scanning Electron Microscopy (ESEM)",
  journal="SENSORS",
  year="2024",
  volume="24",
  number="10",
  pages="1--26",
  doi="10.3390/s24103243",
  issn="1424-8220",
  url="https://www.mdpi.com/1424-8220/24/10/3243"
}