Detail publikace

Factors affecting the Collection Efficiency of Secondary Electrons in SEM.

KONVALINA, I. MÜLLEROVÁ, I.

Originální název

Factors affecting the Collection Efficiency of Secondary Electrons in SEM.

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

The Everhart-Thornley (ET) detector is the most often used type of secondary electron (SE) detector in the Scanning Electron Microscope (SEM). While the overall quality of the final image is influenced by all components of the detection channel, the collection efficiency (CE), which is defined as a ratio of collected SEs to all emitted ones, governs the image contrast and its signal to noise ratio. The detective quantum efficiency (DQE) of such detector has been found significantly below one. The main reason is in complicated distribution of electrostatic and magnetic fields in the specimen vicinity, which strongly influences the secondary electrons trajectories.

Klíčová slova

ET detector, secondary electrons, collection efficiency

Autoři

KONVALINA, I.; MÜLLEROVÁ, I.

Vydáno

28. 8. 2005

Místo

DAVOS

ISSN

1019-6447

Periodikum

Microscopy Conference 2005

Stát

Švýcarská konfederace

Strany od

48

Strany do

49

Strany počet

2

BibTex

@inproceedings{BUT21731,
  author="Ivo {Konvalina} and Ilona {Müllerová}",
  title="Factors affecting the Collection Efficiency of Secondary Electrons in SEM.",
  booktitle="Proceedings - Microscopy Conference 2005 - Dreiländertagung /6./",
  year="2005",
  journal="Microscopy Conference 2005",
  pages="2",
  address="DAVOS",
  issn="1019-6447"
}