Detail publikace

Surface profilometry by a parallel-mode confocal microscope

CHMELÍK, R., HARNA, Z.

Originální název

Surface profilometry by a parallel-mode confocal microscope

Typ

článek v časopise - ostatní, Jost

Jazyk

angličtina

Originální abstrakt

Confocal imaging by a parallel-mode confocal mi-croscope is based on the real-time incoherent-holography technique. Besides the image amplitude, the image phase is inherently reconstructed. In this paper we prove that the phase image component can be converted into the height map, and, in this way, we measure the surface profile with the precision of several nanometers. Small height differences can be measured inside one optical section of the specimen surface, while the measurement of large differences needs to connect more optical sections. The two procedures are demonstrated experimentally even for the surface with large and steep height changes. The ambiguity in the height determination from the image phase component is overcome by means of the depth discrimination property of the microscope. The axial resolution is improved using broadband illumination.

Klíčová slova

holography applications; profilometry; confocal microscopy.

Autoři

CHMELÍK, R., HARNA, Z.

Rok RIV

2002

Vydáno

1. 4. 2002

ISSN

0091-3286

Periodikum

Optical Engineering

Ročník

41

Číslo

4

Stát

Spojené státy americké

Strany od

744

Strany do

745

Strany počet

2

URL

areálová knihovna FSI

BibTex

@article{BUT40858,
  author="Radim {Chmelík} and Zdeněk {Harna}",
  title="Surface profilometry by a parallel-mode confocal microscope",
  journal="Optical Engineering",
  year="2002",
  volume="41",
  number="4",
  pages="2",
  issn="0091-3286",
  url="areálová knihovna FSI"
}