Project detail

Synthesis of Self-Organized, Templated and Surface-Supported Metal and Metal-Oxide Nanostructuresfor Being Used in Advanced Micro- and Nanodevices (AnoNaS)

Duration: 01.06.2011 — 31.07.2013

Funding resources

Evropská unie - Seventh Research Framework Programme

- whole funder (2011-06-01 - 2013-07-31)
Evropská unie - Seventh Research Framework Programme

- whole funder (2011-06-01 - 2013-07-31)

On the project

The goal of the project is to raise the anodizing approach to a conceptional level, that is to bring this technique to the project’s centre and make it compatible with a number of complementing physical and chemical means, such as ED, PVD, CVD, thermal treatment, so as to facilitate the preparation, characterization and application of a variety of one- and three-dimensional orderly nanostructured materials (metals, semiconductors, dielectrics and mixters), with tailored morphologies, anchored to various-type microelectronic substrates, for being used in prospective micro- and nanodevices with improved performances.

Keywords
nanostructures, self-ordering, nanowires, nanocolumns, nanopillars, nanopores, nanotubes

Mark

SIGA722

Default language

English

People responsible

Mozalev Alexander, Dr. - principal person responsible

Units

Department of Microelectronics
- beneficiary (2011-06-01 - not assigned)

Results

MOZALEV, A.; HABAZAKI, H.; HUBALEK, J. The superhydrophobic properties of self-organized microstructured surfaces derived from anodically oxidized Al/Nb and Al/Ta metal layers. Electrochimica Acta, 2012, vol. 82, no. 1, p. 90-97. ISSN: 0013-4686.
Detail

ŠIMŮNKOVÁ, H.; LEDNICKÝ, T.; WHITEHEAD, A.; KALINA, L.; ŠIMŮNEK, P.; HUBÁLEK, J. Tantalum-based nanotube arrays via porous-alumina-assisted electrodeposition from ionic liquid: Formation and electrical characterization. Applied Surface Science, 2021, vol. 548, no. 149264, p. 149264-149274. ISSN: 0169-4332.
Detail

VERGARA, A.; CALAVIA, R.; VAZQUEZ, R.; MOZALEV, A.; ABDELGHANI, A.; HUERTA, R.; HINES, E.; LLOBET, E. Multifrequency Interrogation of Nanostructured Gas Sensor Arrays: A Tool for Analyzing Response Kinetics. ANALYTICAL CHEMISTRY, 2012, vol. 84, no. 17, p. 7502-7510. ISSN: 0003-2700.
Detail

VAZQUEZ, R.; CALAVIA, R.; LLOBET, E.; GISPERT-GUIRADO, F.; HUBALEK, J.; MOZALEV, A. The Growth and Gas Sensing Properties of Mixed Oxide Nanocomposite Thin Film Derived from Anodically Oxidized Al/Ti Metal Layers. Procedia Engineering, 2012, vol. 47, no. 1, p. 833-836. ISSN: 1877-7058.
Detail

VAZQUEZ, R.; CALAVIA, R.; CORREIG, X.; VILANOVA, X.; LLOBET, E.; MOZALEV, A. Micromachined Hydrogen Sensors with Nanostructured Tungsten Oxide Active Layers: Nanodots vs Nanotubes. A Comparative Study. In 4th International Conference on NANOCON. Ketlickova 62, Slezska, Ostrava 710 00, Czech Republic: Tanger ltd, 2012. p. 1-6. ISBN: 978-80-87294-27-7.
Detail

MOZALEV, A.; HABAZAKI, H.; SAKAIRI, M.; HUBALEK, J. Formation-structure-properties of nanocomposite mixed oxide films prepared by porous-alumina-assisted anodizing of Zr-50at.%W alloy layers. 63rd Annual Meeting of the International Society of Electrochemistry (ISE2012. Prague, Czech Republic: ISE, 2012. p. 1 (1 s.).
Detail

SOLOVEI, D.; HUBALEK, J.; MOZALEV, A. The growth and dielectric properties of porous-anodic-alumina-supported nanostructured Ta2O5/Ta films. 63rd Annual Meeting of the International Society of Electrochemistry (ISE2012). Prague, Czech Republic: ISE, 2012. p. 1 (1 s.).
Detail

MOZALEV, A.; VAZQUEZ, R.; CALAVIA, R.; BITTENCOURT, C.; GISPERT-GUIRADO, F.; LLOBET, E.; HUBALEK, J.; HABAZAKI, H. Development of multipurpose metal-oxide films with nanostructured tailored morphologies and tunable properties via anodic processing of A/Nb metal layers. In Proceedings of the 4rd International Conference on NANOCON. Ketlickova 62, Slezska, Ostrava 710 00, Czech Republic: Tangler ltd, 2012. p. 1-6. ISBN: 978-80-87294-27-7.
Detail

MOZALEV, A.; VAZQUEZ, R.; CALAVIA, R.; BITTENCOURT, C.; GISPERT-GUIRADO, F.; LLOBET, E.; HUBALEK, J. Electrical/dielectric properties of metal oxide nanostructured films synthesized by anodic oxidation of Al/Nb bilayers. 9th International Symposium on Electrochemical Micro & Nanosystem Technology (EMNT2012). Linz, Austria: ISE, 2012. p. 1 (1 s.).
Detail

MOZALEV, A.; SOLOVEI, D.; HUBALEK, J.; HABAZAKI, H. The growth and dielectric properties of anodic films on porous-alumina-supported Ta-50wt.%Nb alloy layers. 9th International Symposium on Electrochemical Micro & Nanosystem Technology. Linz, Austria: ISE, 2012. p. 1 ( p.)
Detail

MOZALEV, A.; SAKAIRI, M.; TAKAHASHI, H.; HABAZAKI, H.; HUBALEK, J. Nanostructured anodic-alumina-based dielectrics for high-frequency integral capacitors. Thin Solid Films, 2012, vol. -, no. -, p. 1-9. ISSN: 0040-6090.
Detail

MOZALEV, A.; VAZQUEZ, R.; LLOBET, E.; HUBÁLEK, J.; GISPERT-GUIRADO, F.; CALAVIA, R. Gas sensing properties of nanostructured mixed oxide film prepared by anodizing Zr-W alloy through the alumina nanopores. In Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference. IEEE Service Center 445 Hoes Lane Piscataway, NJ 08855-1331 USA: IEEE, 2013. p. 2075-2078. ISBN: 978-1-4673-4642-9.
Detail

MOZALEV, A.; BENDOVA, M.; HRDY, R.; PYTLICEK, Z.; HUBALEK, J. The formation of Self-organized 3-d Arrays of Semiconductor Metal-oxide Nanocolumns for Advanced Sensor Applications. Proceedings of the International Conference on Advances in Electronic and Photonic Technologies. D. Pudiš. University of Žilina, Slovakia: 2013. p. 7-10. ISBN: 978-80-554-0689-3.
Detail

MOZALEV, A.; CALAVIA, R.; VAZQUEZ, R.; GRACIA, I.; CANE, C.; CORREIG, X.; VILANOVA, X.; GISPERT-GUIRADO, F.; HUBALEK, J.; LLOBET, E. MEMS-microhotplate-based hydrogen gas sensor utilizing the nanostructured porous-anodic-alumina-supported WO3 active layer. INTERNATIONAL JOURNAL OF HYDROGEN ENERGY, 2013, vol. 38, no. -, p. 8011-8021. ISSN: 0360-3199.
Detail

MOZALEV, A.; HUBALEK, J.; SOLOVEI, D.: Nanoporous tantalum oxide; Porous-anodic-alumina-supported nanostructured Ta2O5/Ta films for advanced capacitors. UMEL, SIX, mist. 0.68. URL: http://www.umel.feec.vutbr.cz/LabSensNano/Products.aspx. (funkční vzorek)
Detail

MOZALEV, A.; HUBALEK, J.: nano dielectrics; Nanostructured alumina-tantala dielectrics for high-frequency integral capacitors. LabSensNano, SIX, UMEL. URL: http://www.umel.feec.vutbr.cz/LabSensNano/Products.aspx. (funkční vzorek)
Detail

MOZALEV, A.; HUBALEK, J.: super-coatings; Micro/nano structured superhydrophobic surfaces. LabSensNano, UMEL, mist. 0.68. URL: http://www.umel.feec.vutbr.cz/LabSensNano/Products.aspx. (funkční vzorek)
Detail

MOZALEV, A.; VAZQUEZ, R.; HRDY, R.; HUBALEK, J.: teflon cell; Electrolytic bath for anodic and cathodic processing of metal and oxide layers on dielectric, semiconducting and metallic substrates. LabSensNano, room 0.65. URL: http://www.umel.feec.vutbr.cz/LabSensNano/Products.aspx. (funkční vzorek)
Detail