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Project detail
Duration: 01.01.2018 — 31.12.2020
Funding resources
Technologická agentura ČR - Program na podporu aplikovaného výzkumu a experimentálního vývoje EPSILON (2015-2025)
- whole funder (2017-12-20 - 2020-12-31)
On the project
Description in EnglishThe aim of the project is to develop proprietary bulk crystal growth technology for semiconductor materials with a wide band gap, to develop technology for manufacturing of substrates of 150 mm diameter for semiconductor applications and to develop corresponding methods of crystal and substrates characterization. The world's leading advanced technology will be achieved through effective collaboration between industrial and academic research and development.
Key words in EnglishSilicon, Carbide, Crystal, Substrate, Semiconductor, PVT
Mark
TH03020005
Default language
Czech
People responsible
Čechal Jan, prof. Ing., Ph.D. - fellow researcherMach Jindřich, doc. Ing., Ph.D. - fellow researcherVoborný Stanislav, Ing., Ph.D. - fellow researcherKolíbal Miroslav, doc. Ing., Ph.D. - principal person responsible
Units
Fabrication and Characteris. of Nanostr.- beneficiary (2017-05-15 - not assigned)
Results
KOLÍBAL, M.; BÁBOR, P.; LIGMAJER, F.; KOVAŘÍK, M.; POTOČEK, M.: zdroj atomárního vodíku pro SEM; Analýzy povrchů polovodičových materiálů s velkou šířkou zakázaného pásu a kvantitativní analýza dopantů. Purkyňova 123, Brno 61200, budova C, laboratore cistych prostor. URL: http://nano.ceitec.cz/. (ostatní)Detail