Course detail

Thin Films

FCH-DCO_FTDAcad. year: 2011/2012

Terminology; liquid phase deposition: Langmuir-Blodgett films, self-assembled films, casting methods; introduction to vacuum science and plasma chemistry; chemical vapor deposition: vacuum evaporation, sputtering, plasma polymerization, laser-enhanced CVD; thin film characterization: film growth, film thickness and deposition rate, microscopic and spectroscopic techniques, properties and applications of thin films.

Language of instruction

Czech

Mode of study

Not applicable.

Guarantor

prof. RNDr. Vladimír Čech, Ph.D.

Department

Institute of Materials Science (ÚCHM)

Learning outcomes of the course unit

Advanced technologies and analyses of thin films.

Prerequisites

An introduction to thin films.

Co-requisites

Not applicable.

Planned learning activities and teaching methods

Teaching methods depend on the type of course unit as specified in the article 7 of BUT Rules for Studies and Examinations.

Assesment methods and criteria linked to learning outcomes

Entrance written test and oral exam.

Course curriculum

Film deposition techniques
Film growth
Structural analyses of films
Chemical analysis of films
Film properties

Work placements

Not applicable.

Aims

Advanced technologies and analyses of thin films are the aims of this subject.

Specification of controlled education, way of implementation and compensation for absences

Optional attendance at lectures.

Recommended optional programme components

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

D. Hoffman, B. Singh, J.H. Thomas, Handbook of Vacuum Science and Technology, Academic Press 1998. (CS)
M. Ohring, Materials Science of Thin Films, Academic Press 2002. (CS)
V. L. Mironov, Fundamentals of Scanning Probe Microscopy, NT-MDT 2004. (CS)

Recommended reading

Not applicable.

Classification of course in study plans

  • Programme DPCP_CHM Doctoral

    branch DPCO_CHM , 1 year of study, winter semester, compulsory-optional

  • Programme CKCP_CZV lifelong learning

    branch CKCO_CZV , 1 year of study, winter semester, compulsory-optional

  • Programme DPCP_CHM Doctoral

    branch DPCO_CHM , 2 year of study, winter semester, compulsory-optional

  • Programme DKCP_CHM Doctoral

    branch DKCO_CHM , 1 year of study, winter semester, compulsory-optional
    branch DKCO_CHM , 2 year of study, winter semester, compulsory-optional

Type of course unit

 

Guided consultation in combined form of studies

0 hod., optionally

Teacher / Lecturer

prof. RNDr. Vladimír Čech, Ph.D.