Project detail

Společná laboratoř pro aplikovanou fyziku plazmatu a plazmovou chemii na PřF a PedF MU, VA v Brně a ČFP AV ČR v Praze

Duration: 01.01.1996 — 31.12.2000

Funding resources

Ministerstvo školství, mládeže a tělovýchovy ČR - Posílení výzkumu na vysokých školách

- whole funder

Mark

VS96084

Default language

Czech

People responsible

Janča Jan, prof. RNDr., DrSc. - principal person responsible

Units

Faculty of Mechanical Engineering
- beneficiary (1996-01-01 - 2000-12-31)

Results

OHLÍDAL, I., OHLÍDAL, M., FRANTA, D., TYKAL, M. Comparison of optical and non-optical methods for measuring surface roughness. In 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics. Proceedings of SPIE. Proceedings of SPIE. Washington, USA: SPIE-The International Society for Optical Engineering, 1999. p. 456-467. ISBN: 0-8194-3306-3. ISSN: 0277-786X.
Detail

FRANTA, D., OHLÍDAL, I., KLAPETEK, P., POKORNÝ, P., OHLÍDAL, M. Analysis of inhomogeneous thin films of ZrO2 by the combined optical method and atomic force microscopy. Surface and Interface Analysis, 2001, vol. 2001 (32), no. 1, p. 91 ( p.)ISSN: 0142-2421.
Detail

OHLÍDAL, I., FRANTA, D., OHLÍDAL, M., NAVRÁTIL, K. Determination of thicknesses and spectral dependences of refractive indices of non-absorbing and weakly absorbing thin films using the wavelengths related to extrema in spectral reflectances. Vacuum, 2001, vol. 61, no. 1, p. 285-289. ISSN: 0042-207X.
Detail

OHLÍDAL, I.; FRANTA, D.; PINČÍK, E.; OHLÍDAL, M. Complete optical characterization of the SiO2/Si system by spectroscopic ellipsometry, spectroscopic reflectometry and atomic force microscopy. Surface and Interface Analysis, 1999, vol. 28, no. 1, p. 240 ( p.)ISSN: 0142-2421.
Detail